This inventor holds 12 USPTO granted patents and 1 published patent application. Top assignees: Renesas Electronics Corporation, Renesas Technology Corp., Mitsubishi Denki Kabushiki Kaisha. Active years: 2001-2015.
Location History:
- Hyogo, JP (2001 - 2009)
- Tokyo, JP (2003 - 2013)
- Kanagawa, JP (2015)
Company Filing History:



Years Active: 2001-2015
Title: Mahito Sawada: Innovator in Semiconductor Technology
Introduction
Mahito Sawada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 12 patents. His work focuses on enhancing the performance and reliability of semiconductor devices.
Latest Patents
Among his latest patents is a semiconductor device and method of manufacturing the same. This invention aims to provide a semiconductor device equipped with an element isolation structure that minimizes adverse effects on the electric characteristics of a semiconductor element. The design includes a first silicon oxide film in a shallow trench isolation that is thinner for narrower widths compared to wider ones. Additionally, a second silicon oxide film, which has a relatively high compressive stress achieved through an HDP-CVD method, is more thickly laminated over the first silicon oxide film. This innovative approach enhances the compressive stress of the element isolation oxide film in narrow shallow trench isolations. Another notable patent is the semiconductor device with shallow trench isolation, which shares similar objectives and methodologies.
Career Highlights
Mahito Sawada has worked with notable companies in the semiconductor industry, including Renesas Technology Corporation and Renesas Electronics Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.
Collaborations
Throughout his career, Mahito has collaborated with esteemed colleagues such as Hiroshi Tobimatsu and Hiroyuki Kawata. These partnerships have contributed to the advancement of his research and inventions.
Conclusion
Mahito Sawada's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of advanced semiconductor devices.