The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2009
Filed:
Dec. 08, 2006
Koyu Asai, Hyogo, JP;
Hiroshi Tobimatsu, Hyogo, JP;
Hiroyuki Kawata, Nagano, JP;
Mahito Sawada, Hyogo, JP;
Koyu Asai, Hyogo, JP;
Hiroshi Tobimatsu, Hyogo, JP;
Hiroyuki Kawata, Nagano, JP;
Mahito Sawada, Hyogo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
An interconnection is provided with a dummy interconnection connected to an interconnection body, and the dummy interconnection is provided with a stress concentration portion in which tensile stress higher than that of the interconnection body is generated. In proximity to the stress concentration portion, an insulating film formed by high-density plasma CVD is provided, and the tensile stress is generated in the stress concentration portion by the insulating film. With this structure, the occurrence of a void can be prevented at any position in the interconnection body.