Location History:
- Hyogo, JP (2003 - 2009)
- Tokyo, JP (2003 - 2011)
Company Filing History:
4 out of 3,781 
2 out of 7,524 
2 out of 832,718 Years Active: 2003-2011
Title: Innovator Hiroshi Tobimatsu: Advancing Semiconductor Technology in Tokyo
Introduction
Hiroshi Tobimatsu is a renowned inventor located in Tokyo, Japan, with a notable portfolio consisting of 8 patents. His significant contributions lie in the field of semiconductor technology, particularly in improving manufacturing processes and enhancing reliability.
Latest Patents
One of Hiroshi Tobimatsu’s latest patents describes a method of manufacturing semiconductor devices that aims to enhance reliability and manufacturing yield. This innovative technology focuses on reducing variations in electrical characteristics found in connection hole portions. The process involves placing a semiconductor wafer over a wafer stage in a chamber used for dry cleaning treatment in a deposition system. A principal surface of the wafer undergoes dry cleaning treatment by the supply of a reducing gas. Subsequently, the wafer is subjected to heat treatment at a first temperature ranging from 100 to 150 °C using a showerhead maintained at 180 °C. After vacuum transferring the semiconductor wafer to a separate heat treatment chamber, a second heat treatment occurs at a temperature between 150 and 400 °C, effectively removing residual products from the semiconductor surface.
Career Highlights
Throughout his career, Hiroshi Tobimatsu has worked with prominent companies, including Renesas Technology Corporation. His expertise in semiconductor processes and device manufacturing has led to significant advancements in the field.
Collaborations
Hiroshi has collaborated with esteemed colleagues like Mahito Sawada and Hiroyuki Kawata, sharing insights and driving innovations that contribute to the evolution of semiconductor technologies.
Conclusion
Hiroshi Tobimatsu’s commitment to enhancing semiconductor manufacturing processes reflects his dedication to innovation. His patents not only improve the reliability and yield of semiconductor devices but also represent a significant step forward in the technology landscape. As technology continues to evolve, inventors like Hiroshi play a crucial role in shaping its future.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.