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For the Inventor, By the Inventor

Cupertino, CA, United States of America

Lu Chen

USPTO Granted Patents = 18 

Average Co-Inventor Count = 3.9

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:

goldMedal18 out of 13,684 
 
Applied Materials, Inc.
 patents

Years Active: 2014-2025

where 'Filed Patents' based on already Granted Patents

18 patents (USPTO):
1. 12431358 - Methods and materials for enhanced barrier performance and reduced via resistance (2025-09-30),
2. 12243774 - Impurity removal in doped ALD tantalum nitride (2025-03-04),
3. 12211743 - Method of forming a metal liner for interconnect structures (2025-01-28),
4. 12195845 - Conditioning treatment for ALD productivity (2025-01-14),
5. 12148660 - Low resistance and high reliability metallization module (2024-11-19),
6. 11955382 - Reverse selective etch stop layer (2024-04-09),
7. 11939666 - Methods and apparatus for precleaning and treating wafer surfaces (2024-03-26),
8. 11784127 - Ruthenium liner and cap for back-end-of-line (2023-10-10),
9. 11764157 - Ruthenium liner and cap for back-end-of-line applications (2023-09-19),
10. 11680313 - Selective deposition on non-metallic surfaces (2023-06-20),
11. 11566324 - Conditioning treatment for ALD productivity (2023-01-31),
12. 11410881 - Impurity removal in doped ALD tantalum nitride (2022-08-09),
13. 11270911 - Doping of metal barrier layers (2022-03-08),
14. 10930550 - Barrier for copper metallization and methods of forming (2021-02-23),
15. 9303318 - Multiple complementary gas distribution assemblies (2016-04-05),

Certainly! Here is the article about inventor Lu Chen:

Title: Innovator Spotlight: Lu Chen - Transforming Semiconductor Manufacturing

Introduction:

Lu Chen, a prolific inventor based in Cupertino, CA, has made significant contributions to the field of semiconductor manufacturing with a total of 13 patents under his belt. Known for his groundbreaking work at Applied Materials, Inc., Lu Chen has been instrumental in developing cutting-edge technologies that enhance the efficiency and performance of semiconductor devices.

Latest Patents:

Lu Chen's latest patents showcase his expertise in advancing semiconductor manufacturing processes. One of his recent inventions is the "Reverse Selective Etch Stop Layer," which focuses on improving the resistance of interconnects through innovative etch stop layer techniques. Another notable patent is on "Methods and Apparatus for Precleaning and Treating Wafer Surfaces," highlighting his commitment to enhancing substrate processing through effective cleaning and surface treatment methods.

Career Highlights:

Lu Chen's career at Applied Materials, Inc. has been characterized by a relentless pursuit of innovation and excellence in semiconductor manufacturing. His work has not only led to several valuable patents but has also significantly impacted the industry by introducing novel techniques and processes that set new standards in semiconductor fabrication.

Collaborations:

Lu Chen has collaborated with esteemed colleagues at Applied Materials, Inc., including Tae Hong Ha and Xianmin Tang, to drive forward the boundaries of semiconductor technology. Together, they have worked on various projects that have revolutionized wafer processing and surface treatment methodologies, contributing to the overall advancement of semiconductor manufacturing.

Conclusion:

In conclusion, Lu Chen's unwavering dedication to innovation and his pioneering work in semiconductor manufacturing make him a standout figure in the industry. His patents and collaborations reflect his deep understanding of the complexities of semiconductor processes and his commitment to pushing the boundaries of technological advancement. Lu Chen's contributions continue to shape the future of semiconductor manufacturing, setting new benchmarks for efficiency and performance in the field.

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