Company Filing History:
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Years Active: 2013-2023
Title: Innovations of Inventor Lie-Quan Lee
Introduction
Lie-Quan Lee is a prominent inventor based in Fremont, California, known for his significant contributions to the field of metrology and inspection systems. With a total of 12 patents to his name, he has made remarkable advancements that enhance high-volume production processes.
Latest Patents
Among his latest patents is the "Loosely-coupled inspection and metrology system for high-volume production process monitoring." This innovative metrology system includes a controller that is communicatively coupled to both a reference metrology tool and an optical metrology tool. The controller is equipped with processors that generate geometric and material models to determine profiles and material parameters of test structures. Another notable patent is "Automatic wavelength or angle pruning for optical metrology." This method involves creating a model of a structure, analyzing a dataset for outliers, and modifying the dataset to improve accuracy in optical metrology.
Career Highlights
Lie-Quan Lee has worked with notable companies such as KLA-Tencor Corporation and KLA Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in metrology and inspection technologies.
Collaborations
Lie-Quan has collaborated with esteemed colleagues, including Leonid Poslavsky and Meng Cao, contributing to the advancement of metrology systems.
Conclusion
Lie-Quan Lee's work in the field of metrology has led to significant innovations that improve production processes. His patents reflect a deep understanding of optical metrology and inspection systems, showcasing his expertise and commitment to advancing technology.