The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Jun. 02, 2014
Lie-quan Lee, Fremont, CA (US);
Leonid Poslavsky, Belmont, CA (US);
Lie-Quan Lee, Fremont, CA (US);
Leonid Poslavsky, Belmont, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Automatic wavelength or angle pruning for optical metrology is described. An embodiment of a method for automatic wavelength or angle pruning for optical metrology includes determining a model of a structure including a plurality of parameters; designing and computing a dataset of wavelength-dependent or angle-dependent data for the model; storing the dataset in a computer memory; performing with a processor an analysis of the dataset for the model including applying an outlier detection technology on the dataset, and identifying any data outliers, each data outlier being a wavelength or angle; and, if any data outliers are identified in the analysis of the dataset of the model, removing the wavelengths or angles corresponding to the data outliers from the dataset to generate a modified dataset, and storing the modified dataset in the computer memory.