The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Oct. 02, 2013
Wen Jin, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Junwei Bao, Los Altos, CA (US);
Lie-quan Lee, Fremont, CA (US);
Leonid Poslavsky, Belmont, CA (US);
Wen Jin, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Junwei Bao, Los Altos, CA (US);
Lie-Quan Lee, Fremont, CA (US);
Leonid Poslavsky, Belmont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Embodiments are generally directed to neural network training for library-based critical dimension metrology. An embodiment of a method includes optimizing a threshold for a principal component analysis of a spectrum data set to provide a principal component value, estimating a training target for one or more neural networks, training the one or more neural networks based both on the training target and on the principal component value provided from optimizing the threshold for the principal component analysis, and providing a spectral library based on the one or more trained neural networks.