The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Feb. 28, 2013
Stilian Ivanov Pandev, Santa Clara, CA (US);
Thaddeus Gerard Dziura, San Jose, CA (US);
Meng-fu Shih, San Jose, CA (US);
Lie-quan Lee, Fremont, CA (US);
Stilian Ivanov Pandev, Santa Clara, CA (US);
Thaddeus Gerard Dziura, San Jose, CA (US);
Meng-Fu Shih, San Jose, CA (US);
Lie-Quan Lee, Fremont, CA (US);
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Abstract
Model optimization approaches based on spectral sensitivity is described. For example, a method includes determining a first model of a structure. The first model is based on a first set of parameters. A set of spectral sensitivity variations data is determined for the structure. Spectral sensitivity is determined by derivatives of the spectra with respect to the first set of parameters. The first model of the structure is modified to provide a second model of the structure based on the set of spectral sensitivity variations data. The second model of the structure is based on a second set of parameters different from the first set of parameters. A simulated spectrum derived from the second model of the structure is then provided.