Location History:
- Tokyo, JP (2014)
- Nirasaki, JP (1998 - 2020)
Company Filing History:
Years Active: 1998-2020
Title: Innovations of Kunihiro Tada in Film Deposition Technology
Introduction
Kunihiro Tada, an accomplished inventor based in Nirasaki, Japan, has made significant contributions to the field of film deposition technology. With a portfolio of 19 patents, Tada's work is recognized for its innovative approaches to complex processes in semiconductor manufacturing.
Latest Patents
Among Tada's latest inventions are two noteworthy patents. The first is a deposition device and method, which features a unique design that includes a reaction gas supply part communicating with a process space defined between a placement part and a ceiling part. The device incorporates an annular gap, allowing for efficient gas flow and improved film deposition accuracy.
The second patent details a method for forming conformal metal silicide films. This process utilizes a plasma generated from a deposition gas to create a metal-containing layer on a substrate. By exposing the layer to a reducing gas without plasma, Tada's method ensures the formation of conformal metal silicide layers even in deep trenches with high aspect ratios. This innovation is essential for advanced semiconductor applications requiring precision and reliability.
Career Highlights
Kunihiro Tada has dedicated much of his professional journey to enhancing deposition technologies, working primarily with Tokyo Electron Limited. His work in this domain has earned him recognition and several patents that push the boundaries of current technologies in the semiconductor field.
Collaborations
Throughout his career, Tada has collaborated with esteemed colleagues, including Hayashi Otsuki and Yasuo Kobayashi. These partnerships have fostered an environment of innovation and creativity, significantly contributing to the successful development of their patented technologies.
Conclusion
Kunihiro Tada's innovative contributions to film deposition technology underscore the importance of continuous advancement in the semiconductor industry. His patents not only reflect his expertise but also pave the way for further innovations that will enhance the performance and efficiency of future technologies. As the industry evolves, Tada's work will undoubtedly be influential in shaping its direction.