Kuan-Yu Yeh

Title: Kuan-Yu Yeh: Innovator in Semiconductor Technology

Introduction

Kuan-Yu Yeh, an accomplished inventor based in Taoyuan, Taiwan, has made significant contributions to the semiconductor industry through his innovative methods and patented technologies. With a total of five patents to his name, Yeh continues to influence advancements in semiconductor manufacturing processes.

Latest Patents

One of Kuan-Yu Yeh's latest patents revolves around the theme of 'Deposition Window Enlargement.' This innovative method enhances the process window for forming a source/drain contact in semiconductor devices. The process entails receiving a workpiece that includes a source/drain feature exposed in a source/drain opening defined between two gate structures. It involves conformally depositing a dielectric layer over the sidewalls of the source/drain opening and the top surface of the source/drain feature. Subsequently, the dielectric layer is anisotropically etched to expose the source/drain feature. Further steps include performing an implantation process that features a non-zero tilt angle, followed by a pre-clean process to ensure optimal conditions for the workpiece.

Career Highlights

Kuan-Yu Yeh is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited, one of the most prominent organizations in the semiconductor sector. His role involves the application of advanced techniques that drive efficiency and effectiveness in semiconductor production.

Collaborations

Throughout his career, Yeh has worked alongside esteemed colleagues such as Yi-Hsiang Chao and Min-Hsiu Hung. These collaborations have enriched his work and have fostered an environment of shared innovation and expertise in semiconductor technology.

Conclusion

Kuan-Yu Yeh's dedication to innovation in the semiconductor field, exemplified by his latest patent contributions, underscores his importance as a leading inventor. His methods not only enhance the technical aspects of semiconductor manufacturing but also push the boundaries of what is achievable in this fast-evolving industry. With continued collaboration and research, Kuan-Yu Yeh is set to remain at the forefront of technological advancements.