Company Filing History:
Years Active: 2021-2025
Sure, I can help with that! Here is the article about inventor Klaus Martin Hummler:
Title: Innovator Spotlight: Klaus Martin Hummler
Introduction
Klaus Martin Hummler, a talented inventor based in San Diego, CA, has made significant contributions to the field of extreme ultraviolet (EUV) lithography systems. With a total of 5 patents to his name, Hummler is a pioneering figure in the industry.
Latest Patents
1. *Prolonging optical element lifetime in an EUV lithography system:* This patent focuses on reducing the degradation of reflectivity in reflective optical elements used in EUV radiation systems. By introducing a controlled gas flow into the vacuum chamber, the longevity of these critical components is enhanced.
2. *Guiding device and associated system:* This patent is centered around an EUV radiation source that includes innovative features such as a showerhead with multiple gas-introducing nozzles and exhaust systems to manage gas flow within the vessel. The design aims to optimize the direction of EUV radiation towards the intermediate focus region.
Career Highlights
Klaus Martin Hummler is a valuable member of the team at ASML Netherlands B.V., a leading company in the semiconductor industry. His expertise and groundbreaking inventions have significantly advanced the capabilities of EUV lithography systems, contributing to the company's reputation for innovation and excellence.
Collaborations
Throughout his career, Hummler has had the privilege of working alongside esteemed colleagues such as Igor Vladimirovich Fomenkov and Yue Ma. Their collaborative efforts have resulted in cutting-edge advancements in EUV technology, further solidifying Hummler's position as a key innovator in the field.
Conclusion
In conclusion, Klaus Martin Hummler's dedication to pushing the boundaries of EUV lithography technology through his patented inventions showcases his remarkable talent and commitment to driving progress in the industry. His work continues to inspire future generations of innovators in the field of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.