The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Jan. 25, 2022
Asml Netherlands B.v., Veldhoven, NL;
Michael Anthony Purvis, San Diego, CA (US);
Klaus Martin Hummler, San Diego, CA (US);
Chengyuan Ding, San Diego, CA (US);
Robert Jay Rafac, Encinitas, CA (US);
Igor Vladimirovich Fomenkov, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An amplified optical beam is provided to a region that receives a target including target material, an interaction between the amplified optical beam and the target converting at least some of the target material from a first form to a second form to form a light-emitting plasma; first data comprising information related to the amplified optical beam is accessed; second data comprising information related to the light-emitting plasma is accessed; and an amount of the target material converted from the first form to the second form is determined. The determination is based on at least the first data and the second data, and the second form of the target material is less dense than the first form of the target material.