Location History:
- Nagasaki-ken, JP (1999 - 2008)
- Nagasaki, JP (2003 - 2015)
Company Filing History:
9 out of 4,629 
2 out of 832,843 Years Active: 1999-2015
Title: Keisuke Kawamura: Innovator in Vacuum Processing Technology
Introduction
Keisuke Kawamura is a prominent inventor based in Nagasaki, Japan. He has made significant contributions to the field of vacuum processing technology, holding a total of 11 patents. His innovative work focuses on improving deposition characteristics and reducing equipment costs in vacuum processing apparatuses.
Latest Patents
One of Kawamura's latest patents is a vacuum processing apparatus designed to easily adjust deposition characteristics. This apparatus aims to suppress differences in deposition characteristics between deposition chambers while achieving cost reductions. The design features multiple discharge electrodes supplied with high-frequency power, which form plasma with respect to a substrate. Additionally, the apparatus includes matching boxes that tune the phases and amplitudes of the high-frequency power supplied to the discharge electrodes. The impedance of these matching boxes is set to minimize reflected power, enhancing the efficiency of the system.
Another notable patent is an operation method for cleaning a vacuum processing apparatus. This method involves feeding a cleaning gas into the film deposition chamber after a predetermined number of film deposition processes. The number of processes is calculated based on both film deposition-related and cleaning-related operating times, ensuring optimal performance and maintenance of the apparatus.
Career Highlights
Kawamura has worked with Mitsubishi Heavy Industries Limited, where he has further honed his expertise in vacuum processing technology. His experience in this esteemed company has allowed him to contribute to various innovative projects and advancements in the field.
Collaborations
Throughout his career, Kawamura has collaborated with notable colleagues, including Hiroshi Mashima and Tetsuro Shigemizu. These collaborations have fostered a creative environment that has led to significant advancements in their respective fields.
Conclusion
Keisuke Kawamura's contributions to vacuum processing technology exemplify his innovative spirit and dedication to improving industrial processes. His patents and career achievements highlight his role as a key figure in advancing this important technology.