The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Jun. 27, 2008
Eishiro Sasakawa, Nagasaki, JP;
Masahiro Sakaki, Nagasaki, JP;
Shigekazu Ueno, Nagasaki, JP;
Keisuke Kawamura, Nagasaki, JP;
Akemi Takano, Nagasaki, JP;
Eishiro Sasakawa, Nagasaki, JP;
Masahiro Sakaki, Nagasaki, JP;
Shigekazu Ueno, Nagasaki, JP;
Keisuke Kawamura, Nagasaki, JP;
Akemi Takano, Nagasaki, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
An operation method for cleaning a vacuum processing apparatus includes feeding a cleaning gas into a film deposition chamber of the vacuum processing apparatus when a predetermined number of batches of film deposition process is finished. The predetermined number of batch of film deposition processes is calculated based on a film deposition-related operating time (a film deposition time and a film deposition preparation time) and a cleaning-related operating time (a cleaning procedure time, a cleaning procedure preparation time, and a pre-deposition film deposition time).