Company Filing History:
Years Active: 2005-2012
Title: Kaushal S Patel: Innovator in Antireflective Coating Technologies
Introduction
Kaushal S Patel is a prominent inventor based in Wappingers Falls, NY (US). He has made significant contributions to the field of antireflective coatings, holding a total of 8 patents. His work focuses on developing innovative compositions that enhance lithography processes.
Latest Patents
One of his latest patents is titled "Top antireflective coating composition containing hydrophobic and acidic groups." This invention discloses a composition suitable for use as a top antireflective coating and barrier layer for immersion lithography. The composition is soluble in aqueous base solutions and insoluble in water. It comprises a polymer with at least one hydrophobic moiety, at least one acidic moiety with a pKa of 1 or less, and at least one aqueous base soluble moiety. The invention also includes a method for forming a patterned layer on a substrate using this composition in lithography.
Another notable patent is "Wet developable bottom antireflective coating composition and method for use thereof." This invention presents an antireflective coating composition designed to be applied between a substrate surface and a positive photoresist composition. The composition is developable in an aqueous alkaline developer and comprises a polymer with specific monomer units. The invention also outlines a method for forming and transferring a relief image using this antireflective coating composition in photolithography.
Career Highlights
Kaushal S Patel is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of materials science and lithography. His work has significantly impacted the efficiency and effectiveness of photolithography processes.
Collaborations
Throughout his career, Kaushal has collaborated with notable colleagues, including Pushkara Rao Varanasi and Margaret C Lawson. These collaborations have further advanced the development of antireflective coatings and related technologies.
Conclusion
Kaushal S Patel is a distinguished inventor whose work in antireflective coatings has led to multiple patents and advancements in lithography. His contributions continue to shape the future of materials science and technology.
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