Jörn Lützen

Title: Jörn Lützen: Innovator in Semiconductor Technology

Introduction

Jörn Lützen is a prominent inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on improving the fabrication processes of integrated semiconductor memories, which are crucial for modern electronic devices.

Latest Patents

One of Jörn Lützen's latest patents is a method for fabricating trench capacitors for integrated semiconductor memories. This innovative method involves forming a trench for the trench capacitor, which includes a lower trench region where the capacitor is located and an upper trench region that provides an electrically conductive connection from the capacitor's electrode to the selection transistor's diffusion zone. This approach reduces the number of process steps required for memory cell fabrication and allows for the creation of buried collars in storage capacitors with the necessary insulation quality for very large-scale integrated memory cells with trench diameters of less than 300 nm.

Another notable patent is for the production of a self-adjusted structure on a semiconductor wafer. This method involves creating a structure on the layer surface of the semiconductor wafer that includes reflective and non-reflective area regions. A light-transmissive insulation layer and a light-sensitive layer are produced on the layer surface. Electromagnetic radiation is directed onto the light-sensitive layer at a specific angle of incidence, allowing for the imaging of the layer surface structure with a lateral offset into the light-sensitive layer.

Career Highlights

Jörn Lützen is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has positioned him as a key player in advancing semiconductor technology and enhancing the efficiency of memory cell fabrication.

Collaborations

Throughout his career, Jörn has collaborated with several talented individuals, including Matthias Goldbach and Martin Popp. These collaborations have contributed to the development of innovative solutions in the semiconductor industry.

Conclusion

Jörn Lützen's contributions to semiconductor technology through his patents and work at Infineon Technologies AG highlight his role as an influential inventor in the field. His innovative methods for fabricating trench capacitors and self-adjusted structures are paving the way for advancements in integrated semiconductor memories.