The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Nov. 26, 2003
Applicants:
Lars Heineck, Dresden, DE;
Stephan Kudelka, Ottendorf-Okrilla, DE;
Jörn Lützen, Dresden, DE;
Hans-peter Moll, Dresden, DE;
Martin Popp, Dresden, DE;
Till Schlösser, Dresden, DE;
Johann Steinmetz, Königsbrunn, DE;
Inventors:
Lars Heineck, Dresden, DE;
Stephan Kudelka, Ottendorf-Okrilla, DE;
Jörn Lützen, Dresden, DE;
Hans-Peter Moll, Dresden, DE;
Martin Popp, Dresden, DE;
Till Schlösser, Dresden, DE;
Johann Steinmetz, Königsbrunn, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/20 ; H01L021/425 ;
U.S. Cl.
CPC ...
Abstract
A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.