The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Sep. 12, 2003
Albert Birner, Dresden, DE;
Martin Franosch, München, DE;
Matthias Goldbach, Dresden, DE;
Volker Lehmann, München, DE;
Jörn Lützen, Dresden, DE;
Albert Birner, Dresden, DE;
Martin Franosch, München, DE;
Matthias Goldbach, Dresden, DE;
Volker Lehmann, München, DE;
Jörn Lützen, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Abstract
A base body is provided, on which a first sealing ring and a second sealing ring are disposed. A substrate is disposed on the sealing rings in such a way that a cavity is formed between the first sealing ring, the second sealing ring, the base body and the substrate. An etching substance can be introduced into the cavity in order to etch clear a conductive layer that has been applied to the substrate. When a conductive layer that has been applied to the substrate back surface has been uncovered, an electrolyte can be introduced into the cavity, making contact with the conductive layer and therefore the substrate back surface.