Location History:
- Tualatin, OR (US) (2005 - 2007)
- Lake Oswego, OR (US) (2011 - 2015)
Company Filing History:
Years Active: 2005-2015
Title: Innovations by John H Sukamto in Copper Electroplating
Introduction
John H Sukamto, an accomplished inventor based in Tualatin, Oregon, has made significant contributions to the field of electroplating, with a total of seven patents to his name. His work primarily focuses on improving copper electroplating processes, which are crucial for the semiconductor industry.
Latest Patents
Among his latest patents, Sukamto has developed innovative methods that enhance the efficiency and effectiveness of copper electroplating. One notable patent addresses the control of electrolyte composition in a copper electroplating apparatus. This invention involves managing the concentration of anolyte components through the use of a diluent, enabling users to prevent precipitation of copper salts, thus minimizing anode passivation.
Another important patent revolves around the copper electroplating process for achieving a uniform deposition across wafers and ensuring void-free filling on ruthenium-coated surfaces. This invention describes techniques for depositing and annealing a copper seed layer, utilizing a low-oxygen atmosphere to improve the properties of the layer, which is integral for modern semiconductor fabrication.
Career Highlights
John H Sukamto currently works at Novellus Systems Incorporated, where his expertise in electroplating technologies is applied in cutting-edge manufacturing processes. His contributions to the company demonstrate his commitment to advancing innovation in the semiconductor sector.
Collaborations
Throughout his career, Sukamto has collaborated with talented professionals, including coworkers Jonathan David Reid and Steven T Mayer. These partnerships have facilitated the development of his impactful innovations and highlight the collaborative spirit within the field.
Conclusion
John H Sukamto's work in the area of copper electroplating exemplifies the importance of innovation in the semiconductor industry. With his patents providing breakthroughs that enhance manufacturing techniques, he continues to play a vital role in advancing technology in Tualatin, Oregon, and beyond.