Isamu Miyamoto

Title: Isamu Miyamoto: Innovator in Substrate Processing Technology

Introduction

Isamu Miyamoto is a prominent inventor based in Koshi, Japan, known for his significant contributions to substrate processing technology. With a total of eight patents to his name, Miyamoto has made remarkable advancements in the field, particularly through his work at Tokyo Electron Limited.

Latest Patents

Miyamoto's latest patents include a substrate processing system that features a measurement processing process for determining the cut width of a film. This system utilizes an imaging unit to capture images of the peripheral portion of a substrate processed according to a substrate processing recipe. Additionally, it includes a creation process for generating a management list that correlates the set value of the cut width, the measured value, and the time information of the measurement result. An analysis process is also provided to evaluate the state of the processed substrate based on the management list, along with a notification process that alerts users based on the analysis results.

Another notable patent is the substrate processing method, which describes a substrate processing apparatus. This apparatus consists of a mixer that combines sulfuric acid with a second component to create an etchant. It features a nozzle for ejecting the etchant onto the substrate, along with a first component supplier and a second component supplier, each equipped with flow paths, flowmeters, and flow rate controllers. The controller manages the flow rates of both components during the etching process.

Career Highlights

Miyamoto has established himself as a key figure in the field of substrate processing through his innovative designs and solutions. His work at Tokyo Electron Limited has positioned him at the forefront of technological advancements in this area.

Collaborations

Miyamoto has collaborated with notable colleagues, including Yoshifumi Amano and Satoshi Morita, contributing to a dynamic and innovative work environment.

Conclusion

Isamu Miyamoto's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a leading inventor in the industry. His innovative approaches continue to influence the field and pave the way for future advancements.