The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Mar. 09, 2017
Tokyo Electron Limited, Tokyo, JP;
Yoshifumi Amano, Koshi, JP;
Satoshi Morita, Koshi, JP;
Ryoji Ikebe, Koshi, JP;
Isamu Miyamoto, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A measurement processing process Sof measuring a cut width of a film based on an image obtained by imaging, with an imaging unit, a peripheral portion of a substrate which is processed based on a substrate processing recipe; a creation process Sof creating a management list in which a set value of the cut width of the film, a measurement value of the cut width of the film measured through the measurement processing process and time information at which the measurement result is obtained are correlated; an analysis process S(S) of analyzing a state of the processed substrate based on the created management list; and a notification process S(S, S) of making a preset notification to a user based on an analysis result obtained through the analysis process are provided.