The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Mar. 09, 2017
Tokyo Electron Limited, Tokyo, JP;
Yoshifumi Amano, Koshi, JP;
Satoshi Morita, Koshi, JP;
Ryoji Ikebe, Koshi, JP;
Isamu Miyamoto, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Whether a film on a peripheral portion of a substrate is appropriately removed is rapidly determined without depending on a kind of the film on the peripheral portion to be removed. An acquisition process Sof acquiring information upon the kind of the film of the substrate; a selection process Sof selecting a measurement setting corresponding to the acquired kind of the film from a table for measurement settings previously stored in a storage unit; a control process Sof controlling an imaging unitto image the peripheral portion of the substrate by using the measurement setting selected in the selection process are provided.