The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Mar. 09, 2017
Tokyo Electron Limited, Tokyo, JP;
Yoshifumi Amano, Koshi, JP;
Satoshi Morita, Koshi, JP;
Ryoji Ikebe, Koshi, JP;
Isamu Miyamoto, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Imaging can be performed well even when an imaging device is disposed at a position facing a peripheral portion of a substrate. A substrate processing apparatuswhich performs a processing of removing a film on a peripheral portion of a substrate W includes a rotating/holding unitconfigured to hold and rotate the substrate; a first processing liquid supply unitA configured to supply a first processing liquid for removing the film onto the peripheral portion of the substrate while the substrate is being rotated in a first rotational direction Rby the rotating/holding unit; and an imaging unitprovided at a position in front of an arrival regionof the first processing liquid on the substrate with respect to the first rotational direction R, and configured to image the peripheral portion of the substrate.