Il-Kwang Yang is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 14 patents. His work focuses on enhancing the efficiency and effectiveness of substrate supporting units and processing apparatuses.

Latest Patents

Among his latest patents are the substrate supporting unit, substrate processing apparatus, and method of manufacturing the substrate supporting unit. The substrate supporting unit features a susceptor equipped with heaters designed to heat a substrate placed on it. This unit includes a first temperature region and a second temperature region, with the latter maintaining a higher temperature than the former. Additionally, a heat dissipating member is incorporated, which has a contact surface in thermal contact with the second temperature region. This member is designed in a ring shape, surrounding an opening that corresponds to the first temperature region. Furthermore, Yang has developed a method for substrate processing that involves stacking substrates on a holder within a lower chamber, utilizing exhaust ports for efficient processing.

Career Highlights

Il-Kwang Yang is currently associated with Eugene Technology Co., Ltd., where he continues to innovate in substrate processing technologies. His expertise has led to advancements that are crucial for various applications in the semiconductor industry.

Collaborations

Yang has collaborated with notable coworkers, including Kyong-Hun Kim and Yang-Sik Shin, contributing to a dynamic team focused on technological advancements.

Conclusion

Il-Kwang Yang's contributions to substrate processing and his innovative patents underscore his role as a leading inventor in his field. His work continues to influence the industry and drive technological progress.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com