The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Nov. 23, 2012
Eugene Technology Co., Ltd., Gyeonggi-do, KR;
Il-Kwang Yang, Gyeonggi-do, KR;
Byoung-Gyu Song, Gyeonggi-do, KR;
Yong-Ki Kim, Chungcheongnam-do, KR;
Kyong-Hun Kim, Gyeonggi-do, KR;
Yang-Sik Shin, Gyeonggi-do, KR;
EUGENE TECHNOLOGY CO., LTD., Yongin-si, Gyeonggi-do, unknown;
Abstract
Provided is a substrate processing apparatus. The substrate processing apparatus in which a process with respect to substrates is performed includes a lower chamber having an opened upper portion, the lower chamber having a passage, through which the substrates are accessible, in a side thereof, an external reaction tube closing the opened upper portion of the lower chamber to provide a process space in which the process is performed, a substrate holder on which the one or more substrates are vertically stacked, the substrate holder being movable between a stacking position at which the substrates are stacked within the substrate holder and a process position at which the process with respect to the substrates is performed, a gas supply unit supplying a reaction gas into the process space, and a processing unit disposed outside the external reaction tube to activate the reaction gas, thereby performing the process with respect to the substrates.