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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9644895 B1

PDFFull Text
Date of Patent:
May. 09, 2017

Filed:

Apr. 03, 2013

Heater moving type substrate processing apparatus

Applicant:

Eugene Technology Co., Ltd., Gyeonggi-do, KR;

Inventors:

Il-Kwang Yang, Gyeonggi-do, KR;

Byoung-Gyu Song, Gyeonggi-do, KR;

Kyong-Hun Kim, Gyeonggi-do, KR;

Yong-Ki Kim, Chungcheongnam-do, KR;

Yang-Sik Shin, Gyeonggi-do, KR;

Assignee:

EUGENE TECHNOLOGY CO., LTD., Yongin-si, Gyeonggi-do, KR;

Attorney:

Rabin & Berdo, P.C.

Primary Examiner:

Gregory A Wilson

Int. Cl.
CPC ...
H05B 3/68 (2006.01); F27D 19/00 (2006.01); F27D 7/02 (2006.01); F27D 7/06 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/46 (2006.01); C30B 25/10 (2006.01); C30B 33/12 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
F27D 19/00 (2013.01); C23C 16/46 (2013.01); C30B 25/10 (2013.01); C30B 33/12 (2013.01); C30B 35/00 (2013.01); F27D 7/02 (2013.01); F27D 7/06 (2013.01); H01L 21/67109 (2013.01); H01L 21/68742 (2013.01); F27D 2007/066 (2013.01); F27D 2019/0028 (2013.01);
Abstract

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing an inner space in which a process with respect to a substrate is performed, a heating plate on which the substrate is placed, the heating plate being fixedly disposed within the chamber, a heater spaced from a lower portion of the heating plate to heat the heating plate, and a lift module lifting the heater.

Find Patent Forward Citations

Yang, Il-Kwang. (2017). Heater moving type substrate processing apparatus (U.S. Patent No. 9644895). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9644895

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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