This inventor holds 7 USPTO granted patents. Top assignee: Ebara Corporation. Active years: 2003-2009.
Company Filing History:
Years Active: 2003-2009
Title: Ichiro Katakabe: Innovator in Substrate Processing Technology
Introduction
Ichiro Katakabe is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 7 patents. His work primarily focuses on improving methods and apparatuses for processing substrates, particularly in the semiconductor and liquid crystal industries.
Latest Patents
Katakabe's latest patents include a substrate processing apparatus, a substrate processing method, and a substrate holding apparatus. These innovations are designed to perform various processes such as chemical liquid processing, cleaning, and drying while rotating substrates like semiconductor wafers or liquid crystal substrates. The substrate processing apparatus features a substrate holder for holding and rotating the substrate, along with a holder suction unit that effectively removes fluids from the substrate holder. Additionally, his substrate holding apparatus utilizes multiple rollers to securely hold and rotate the substrate, ensuring efficient processing.
Another notable invention is an apparatus for processing substrates through successive steps, including spin-drying, while preventing contamination from processing liquids. This apparatus includes a substrate holder, a scattering prevention cup that surrounds the substrate to contain processing liquids, and a cleaner for maintaining the inner wall of the scattering prevention cup.
Career Highlights
Ichiro Katakabe has established himself as a key figure in substrate processing technology through his innovative designs and patents. His work at Ebara Corporation has allowed him to collaborate with other talented professionals in the field, further enhancing the development of advanced substrate processing solutions.
Collaborations
Some of his notable coworkers include Sachiko Kihara and Haruko Ohno. Their collaborative efforts have contributed to the success of various projects within the company.
Conclusion
Ichiro Katakabe's contributions to substrate processing technology have made a significant impact on the industry. His innovative patents and collaborative work at Ebara Corporation continue to advance the field, showcasing his dedication to improving substrate processing methods.