The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Oct. 06, 2000
Applicant:
Inventors:
Ichiro Katakabe, Tokyo, JP;
Shinya Morisawa, Tokyo, JP;
Haruko Ohno, Tokyo, JP;
Sachiko Kihara, Tokyo, JP;
Akira Fukunaga, Tokyo, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/02 ; B08B 7/00 ; H01L 2/100 ;
U.S. Cl.
CPC ...
B08B 3/02 ; B08B 7/00 ; H01L 2/100 ;
Abstract
An acid solution is continuously supplied to a central portion of a surface of a substrate while the substrate is rotating, and an oxidizing agent solution is continuously or intermittently supplied to a periphery of the substrate. In addition, an oxidizing agent solution and an acid solution are simultaneously or alternately supplied to a reverse side of the substrate.