Company Filing History:
Years Active: 1990-2010
Title: Innovations of Hideki Gomi
Introduction
Hideki Gomi is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work has been instrumental in advancing the manufacturing processes of semiconductor devices.
Latest Patents
One of Gomi's latest patents is a method for manufacturing a semiconductor storage device that includes a slow cooling step. This process begins with preparing a base structure that contains the main parts of a memory cell. A lower electrode made of a polycrystalline silicon film is then formed on this base structure. The surface of the lower electrode undergoes thermal nitridation at a predetermined temperature to create a silicon nitride film. During this nitridation, the temperature is increased to a specific nitriding temperature, followed by a gradual reduction in temperature. Subsequently, an aluminum oxide or another metal oxide dielectric film is formed as the capacitive insulating film on the lower electrode, and an upper electrode is placed on top of this insulating film.
Another notable patent involves an apparatus with high-temperature gas releasing means for the vapor deposition of parylene polymer without peeling. Parylene polymer is favored for use as an inter-level insulating layer due to its low dielectric constant. However, during deposition, residual dimer or monomer can lead to outgassing, causing the silicon oxide layer to peel off from the polymer layer. To mitigate this issue, Gomi's invention includes a process where the polymer layer is annealed before the deposition of silicon oxide, allowing for the release of residual dimer or monomer.
Career Highlights
Throughout his career, Hideki Gomi has worked with notable companies such as NEC Corporation and Elpida Memory, Inc. His expertise in semiconductor technology has made him a valuable asset in these organizations.
Collaborations
Gomi has collaborated with several professionals in his field, including Kouji Yamazaki and Takashi Arao. Their collective efforts have contributed to advancements in semiconductor manufacturing techniques.
Conclusion
Hideki Gomi's innovative patents and career achievements highlight his significant impact on semiconductor technology. His work continues to influence the industry and pave the way for future advancements.