Location History:
- Kanagawa, JP (1988)
- Yokohama, JP (1986 - 2001)
Company Filing History:
Years Active: 1986-2001
Title: Innovations by Hideaki Shimamura
Introduction
Hideaki Shimamura is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of vacuum processing technology, holding a total of 7 patents. His work primarily focuses on advancements in film deposition methods and apparatuses.
Latest Patents
Among his latest patents are a vacuum processing apparatus and a film deposition apparatus, along with a film deposition method that utilizes this vacuum processing apparatus. The vacuum processing apparatus is designed to perform various processes on a wafer within a vacuum chamber. Notably, the film deposition method and apparatus are characterized by their ability to control the temperature of the wafer during the deposition process. This innovation includes a unique calibration stage and shutter system for emissivity calibration, ensuring precise temperature control during film deposition.
Career Highlights
Hideaki Shimamura is currently employed at Hitachi, Ltd., where he continues to develop cutting-edge technologies in vacuum processing. His expertise in this area has led to significant advancements that enhance the efficiency and effectiveness of film deposition processes.
Collaborations
Throughout his career, Shimamura has collaborated with notable colleagues, including Shigeru Kobayashi and Masao Sakata. These collaborations have contributed to the development of innovative solutions in the field of vacuum processing.
Conclusion
Hideaki Shimamura's contributions to vacuum processing technology and film deposition methods have established him as a key figure in his field. His innovative patents and ongoing work at Hitachi, Ltd. continue to influence advancements in this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.