Company Filing History:
Years Active: 2019-2023
Title: Innovations by Inventor Hari Pathangi
Introduction
Hari Pathangi is a notable inventor based in Chennai, India. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on enhancing imaging techniques while preserving the integrity of sensitive materials used in the industry.
Latest Patents
One of Hari Pathangi's latest patents involves enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes. This innovation allows for the adjustment of the electron beam to a first electron dose/nm/time value that is below a damage threshold for an image frame grab of a site on the semiconductor wafer. Subsequently, the electron beam can be adjusted to a second electron dose/nm/time value, which may exceed the damage threshold, for a second image frame grab of the same site.
Another significant patent focuses on using absolute Z-height values for synergy between tools. In this patent, a semiconductor review tool receives absolute Z-height values for the semiconductor wafer, including those with a beveled edge. These values can be determined by a semiconductor inspection tool, allowing the review tool to assess the semiconductor wafer within a Z-height based on the absolute Z-height values. This innovation enables precise focus adjustments within the Z-height.
Career Highlights
Hari Pathangi has worked with prominent companies in the semiconductor industry, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technologies.
Collaborations
Throughout his career, Hari has collaborated with talented individuals such as Sivaprrasath Meenakshisundaram and Tanay Bansal. These collaborations have further enriched his work and led to advancements in semiconductor manufacturing processes.
Conclusion
In summary, Hari Pathangi is a distinguished inventor whose innovations in semiconductor manufacturing have made a significant impact on the industry. His patents reflect a commitment to improving imaging techniques and ensuring the integrity of sensitive materials.