The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Mar. 31, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Sandeep Madhogarhia, Howrah, IN;
Hari Sriraman Pathangi, Chennai, IN;
Rohit Bhat, Milpitas, CA (US);
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01); G01B 7/31 (2006.01); H01L 21/02 (2006.01); G01B 15/02 (2006.01); G01N 23/22 (2018.01);
U.S. Cl.
CPC ...
H01L 21/461 (2013.01); G01B 7/31 (2013.01); G01B 15/025 (2013.01); G01N 23/22 (2013.01); H01L 21/02689 (2013.01);
Abstract
A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.