Kawasaki, Japan

Genichi Komuro



Average Co-Inventor Count = 2.3

ph-index = 4

Forward Citations = 58(Granted Patents)


Company Filing History:


Years Active: 1998-2011

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14 patents (USPTO):Explore Patents

Title: **Genichi Komuro: A Pioneer in Semiconductor Innovation**

Introduction

Genichi Komuro is a prominent inventor based in Kawasaki, Japan, recognized for his significant contributions to the field of semiconductor technology. With an impressive portfolio of 14 patents, his innovations have played a vital role in advancing semiconductor devices and manufacturing methods.

Latest Patents

Among Komuro's latest inventions is a patent for a **semiconductor device and method for manufacturing the same**. This patented technology includes a silicon substrate with a source/drain region designed in its surface layer. It incorporates a first insulating film featuring a first hole on the first source/drain region and a conductive film on the inner surface of this hole. Moreover, the filler body formed of an insulating material creates a first contact plug in conjunction with the conductive film. This device also integrates a capacitor constructed on the first contact plug, complete with a lower electrode linked to the conductive film, a capacitor dielectric film made of ferroelectric material, and an upper electrode.

Another noteworthy patent is the **plasma etching method and apparatus**, which details a plasma etching apparatus specifically designed for semiconductor wafers. This apparatus features a reaction tube made from dielectric material and includes a high-frequency antenna positioned around the reaction tube to generate plasma within it. The antenna has a sloped segment that enhances capacitive coupling with the reaction tube and is maneuvered by a driver within a horizontal plane, presenting a sophisticated method for semiconductor wafer etching.

Career Highlights

Genichi Komuro's career has seen him collaborate with renowned organizations such as Fujitsu Corporation and Fujitsu Microelectronics Limited, where he contributed to groundbreaking advancements in semiconductor technology. His work has not only propelled the development of innovative devices but also significantly impacted the industry standards for semiconductor manufacturing processes.

Collaborations

Throughout his career, Komuro has had the opportunity to work alongside talented colleagues, including Yoichi Okita and Hideaki Kikuchi. Their collaboration has fostered an environment of creativity and innovation, leading to the birth of many successful inventions in the semiconductor field.

Conclusion

Genichi Komuro represents the essence of innovation in the semiconductor industry. With his extensive experience, valuable patents, and collaborative spirit, he continues to shape the future of semiconductor technology. His work exemplifies the importance of continuous advancement and the powerful impact of innovation on technology as we know it today.

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