The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Dec. 15, 2005
Tomohiro Takamatsu, Kawasaki, JP;
Jirou Miura, Kawasaki, JP;
Mitsuhiro Nakamura, Kawasaki, JP;
Hirotoshi Tachibana, Kawasaki, JP;
Genichi Komuro, Kawasaki, JP;
Tomohiro Takamatsu, Kawasaki, JP;
Jirou Miura, Kawasaki, JP;
Mitsuhiro Nakamura, Kawasaki, JP;
Hirotoshi Tachibana, Kawasaki, JP;
Genichi Komuro, Kawasaki, JP;
Fujitsu Microelectronics Limited, Tokyo, JP;
Abstract
A ferroelectric capacitor including a bottom electrode (), a ferroelectric film () and a top electrode () is covered with an interlayer insulating film (). One end of the bottom electrode () is formed like comb teeth. To match with the remaining portion of that end, a plurality of contact holes () are formed in the interlayer insulating film (). In other words, gaps (notches) are formed in the bottom electrode () between lower ends of at least two of the contact holes (). And a wiring () connected to the bottom electrode () through the contact holes () is formed on the interlayer insulating film ().