Company Filing History:
Years Active: 2023-2025
Title: Innovations of Feihu Wang in Semiconductor Technology
Introduction
Feihu Wang is a prominent inventor based in San Jose, California, known for his significant contributions to semiconductor technology. With a total of seven patents to his name, Wang has made remarkable advancements in the field, particularly in the development of metal contact stacks and tungsten films.
Latest Patents
One of Wang's latest patents is titled "Low resistivity metal contact stack." This patent describes methods for depositing a metal contact stack on a substrate, which includes a metal cap layer and a molybdenum conductor layer. The innovative method involves depositing the metal cap layer on the substrate using physical vapor deposition (PVD) and subsequently depositing the molybdenum conductor layer by atomic layer deposition (ALD) on the metal cap layer. Another notable patent is "Low resistivity tungsten film and method of manufacture." This patent provides apparatus and methods for creating electronic devices that comprise tungsten film stacks. It details a process where a tungsten liner formed by physical vapor deposition is filled with a tungsten film formed by chemical vapor deposition directly over the tungsten liner.
Career Highlights
Feihu Wang is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on enhancing the performance and efficiency of electronic devices through innovative material applications and deposition techniques.
Collaborations
Wang has collaborated with several talented individuals in his field, including Joung Joo Lee and Yixiong Yang. These collaborations have contributed to the advancement of technology and the successful development of various patents.
Conclusion
Feihu Wang's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to pave the way for advancements in electronic devices and materials.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.