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Tempe, AZ, United States of America

Fei Wang

USPTO Granted Patents = 4 (Patent Applications = 4)

Average Co-Inventor Count = 3.2

ph-index = 1

Forward Citations = 2(Granted Patents)

Company Filing History:

Asm IP Holding B.v.

Years Active: 2022-2025

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4 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12272527 - Apparatus for use with hydrogen radicals and method of using same (2025-04-08),

2. 12112938 - Semiconductor processing preclean methods and apparatus (2024-10-08),

3. 11437241 - Apparatus and methods for selectively etching silicon oxide films (2022-09-06),

4. 11315794 - Apparatus and methods for selectively etching films (2022-04-26),

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