The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
May. 09, 2018
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Xing Lin, Chandler, AZ (US);
Chuang Wei, Chandler, AZ (US);
Wentao Wang, Phoenix, AZ (US);
Peipei Gao, Tempe, AZ (US);
Fei Wang, Tempe, AZ (US);
Bubesh Babu Jotheeswaran, Gilbert, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 5/00 (2006.01); B08B 17/06 (2006.01); H01J 37/32 (2006.01); C23C 16/40 (2006.01); H01L 21/02 (2006.01); H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); B08B 5/00 (2013.01); B08B 17/06 (2013.01); H01J 37/3244 (2013.01); H01L 21/67017 (2013.01); C23C 16/403 (2013.01); H01J 2237/335 (2013.01); H01L 21/02057 (2013.01); H01L 21/3003 (2013.01);
Abstract
A system and method suitable for removing both carbon-based contaminants and oxygen-based contaminants from a substrate within a single process chamber are disclosed.