Company Filing History:
Years Active: 2024-2025
Title: Innovations by Inventor Chuang Wei
Introduction
Chuang Wei is a notable inventor based in Chandler, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on developing advanced coatings and methods that enhance the performance of semiconductor manufacturing processes.
Latest Patents
Chuang Wei's latest patents include innovative solutions for high-temperature coatings used in semiconductor film pre-clean and etch apparatuses. One of his patents proposes a coating and a method to form the coating that can be utilized in environments where traditional coatings are ineffective. This coating allows for the effective delivery of hydrogen and fluorine radicals to a wafer surface, either in a single apparatus or across two separate systems. It also provides coverage for high aspect ratio features on critical components and operates effectively at temperatures exceeding 150° C. Additionally, it protects parts with high aspect ratio features underneath the coating, preventing contamination from metal and particles on processed wafers.
Another significant patent is for an apparatus designed for use with hydrogen radicals, which includes a method for removing both carbon-based and oxygen-based contaminants from a substrate within a single process chamber. This innovation streamlines the cleaning process, making it more efficient and effective.
Career Highlights
Chuang Wei is currently employed at ASML Holding B.V., a leading company in the semiconductor industry. His work at ASML has positioned him as a key player in the development of advanced technologies that drive innovation in semiconductor manufacturing.
Collaborations
Chuang Wei has collaborated with talented coworkers, including Xing Lin and Wentao Wang, contributing to the advancement of semiconductor technologies through teamwork and shared expertise.
Conclusion
Chuang Wei's contributions to the field of semiconductor technology through his innovative patents demonstrate his commitment to advancing manufacturing processes. His work continues to influence the industry, paving the way for future innovations.