Location History:
- Albuquerque, NM (US) (2010 - 2013)
- Newton, MA (US) (2013)
- Belmont, MA (US) (2015 - 2022)
Company Filing History:
4 out of 523 
1 out of 1,407 
1 out of 702 
Years Active: 2010-2022
Title: Deying Xia: Innovator in Semiconductor Inspection and Nanochannel Fabrication
Introduction
Deying Xia is a prominent inventor based in Belmont, MA (US), known for his significant contributions to the fields of semiconductor inspection and nanochannel fabrication. With a total of five patents to his name, Xia has developed innovative technologies that enhance the quality and efficiency of semiconductor structures.
Latest Patents
One of Xia's latest patents is an "Inspection system and inspection method to qualify semiconductor structures." This advanced inspection system utilizes an ion beam source for space-resolved exposition of semiconductor structures. It also features a secondary ion detection device equipped with a mass spectrometer, which is designed to measure the ion mass to charge ratio within a specific bandwidth. Another notable patent is for the "Fabrication of enclosed nanochannels using silica nanoparticles." This method involves depositing a photosensitive film stack over a substrate and forming a pattern using interferometric lithography. The process further includes depositing silica nanoparticles to create a structure over the pattern and removing the pattern while retaining the structure, resulting in an enclosed nanochannel.
Career Highlights
Throughout his career, Deying Xia has worked with reputable companies such as Stc.unm and Carl Zeiss SMT GmbH. His work in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in technology.
Collaborations
Xia has collaborated with notable individuals in his field, including Steven Roy Julien Brueck and Yuliya Kuznetsova. These collaborations have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Deying Xia's work in semiconductor inspection and nanochannel fabrication showcases his innovative spirit and dedication to advancing technology. His contributions have made a significant impact in his field, and his patents reflect his expertise and creativity.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.