The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Dec. 21, 2020
Applicants:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss Microscopy, Llc, Thornwood, NY (US);
Inventors:
Brett Lewis, Arlington, MA (US);
Wilhelm Kuehn, Koenigsbronn, DE;
Deying Xia, Belmont, MA (US);
Shawn McVey, Newton, NH (US);
Ulrich Mantz, Schelklingen, DE;
Assignees:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss Microscopy, LLC, Thornwood, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/2258 (2018.01); H01J 37/26 (2006.01); H01J 49/14 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2258 (2013.01); H01J 37/26 (2013.01); H01J 49/142 (2013.01); H01L 21/67288 (2013.01);
Abstract
An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.