Location History:
- Youngjing, TW (2018 - 2023)
- Hsinchu, TW (2019 - 2024)
Company Filing History:
Years Active: 2018-2024
Title: Inventor Spotlight: ChunHung Chen
Introduction
ChunHung Chen is a notable inventor based in Youngjing, Taiwan, recognized for his significant contributions to the semiconductor industry. With a total of 12 patents to his name, he has made remarkable advancements in methods related to polishing pads and chemical mechanical polishing processes.
Latest Patents
One of his latest innovations is a method of using a polishing pad, which involves applying a slurry to a specific location on the pad. The process includes rotating the polishing pad and strategically spreading the slurry across multiple regions at varying rates. The details of this method highlight intricate control over the polishing process, which is crucial for achieving desired surface finishes in semiconductor fabrication.
Another notable patent is focused on performing planarization process controls during semiconductor fabrication. This method includes a chemical mechanical polishing process where byproducts are collected and analyzed to enhance process controls. Using feedback from the analysis, adjustments can be made to ensure the efficiency and accuracy of the planarization process, safeguarding against potential errors.
Career Highlights
ChunHung Chen is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading entity in the semiconductor industry. His work is pivotal in enhancing fabrication techniques that contribute to the advancement of technology in microelectronics and semiconductor manufacturing.
Collaborations
At Taiwan Semiconductor Manufacturing Company Ltd., ChunHung collaborates with talented professionals such as Sheng-Chen Wang and Jung-Yu Li. Together, they work on pioneering technologies that further push the boundaries of semiconductor fabrication, ensuring the company remains at the forefront of innovation in the industry.
Conclusion
ChunHung Chen stands out as an influential inventor whose work significantly impacts the semiconductor sector. His innovative methods not only enhance the manufacturing processes but also pave the way for future advancements in technology.