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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10864612 B1

PDFFull Text
Date of Patent:
Dec. 15, 2020

Filed:

Jul. 12, 2017

Polishing pad and method of using

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

ChunHung Chen, Hsinchu, TW;

Jung-Yu Li, Taichung, TW;

Sheng-Chen Wang, Taichung, TW;

Shih-Sian Huang, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

Hauptman Ham, LLP

Primary Examiner:

Eileen P Morgan

Int. Cl.
CPC ...
B24B 37/10 (2012.01); B24B 37/22 (2012.01); B24B 37/24 (2012.01); B24B 37/26 (2012.01); B24B 53/017 (2012.01); B24B 37/005 (2012.01); B24B 49/12 (2006.01);
U.S. Cl.
CPC ...
B24B 37/26 (2013.01); B24B 37/005 (2013.01); B24B 37/10 (2013.01); B24B 37/22 (2013.01); B24B 37/24 (2013.01); B24B 49/12 (2013.01); B24B 53/017 (2013.01);
Abstract

A polishing pad includes a first region having a first geometric property and a first material property. The polishing pad further includes a second region having a second geometric property and a second material property, wherein the second region is closer to an edge of the polishing pad than the first region. The first geometric property is different from the second geometric property; or the first material property is different from the second material property.

Find Patent Forward Citations

Chen, ChunHung. (2020). Polishing pad and method of using (U.S. Patent No. 10864612). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10864612

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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