Singapore, Singapore

Cho Jui Tay



Average Co-Inventor Count = 5.2

ph-index = 2

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2006-2013

where 'Filed Patents' based on already Granted Patents

4 patents (USPTO):

Title: Cho Jui Tay: Innovator in Semiconductor Technology

Introduction

Cho Jui Tay is a prominent inventor based in Singapore, known for his contributions to semiconductor technology. He holds a total of 4 patents that focus on enhancing photolithography patterning methods, which are crucial in the fabrication of semiconductor devices. His innovative approaches have significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, one notable invention is a method for enhancing photolithography patterning. This method involves fabricating a semiconductor device by preparing a substrate with a photoresist layer and utilizing a photomask with specific patterns. The process includes providing a composite aperture that improves the process window for different pitch ranges, exposing the photoresist layer, and developing it to achieve the desired pattern.

Another significant patent is the angled-wedge chrome-face wall for intensity balance of an alternating phase shift mask. This method includes providing a substrate with a photoresist layer and transmitting light through a specially designed mask. The mask features slanted sidewalls that enhance the pattern transfer to the photoresist, thereby improving the overall quality of the semiconductor device.

Career Highlights

Cho Jui Tay has worked with notable organizations such as Globalfoundries Singapore Pte. Ltd. and the National University of Singapore. His experience in these institutions has allowed him to collaborate with leading experts in the field and contribute to groundbreaking research in semiconductor technology.

Collaborations

Some of his notable coworkers include Gek Soon Chua and Qunying Lin, who have also made significant contributions to the field of semiconductor research. Their collaborative efforts have further advanced the understanding and development of innovative semiconductor technologies.

Conclusion

In summary, Cho Jui Tay is a distinguished inventor whose work in semiconductor technology has led to several important patents. His innovative methods continue to influence the industry and pave the way for future advancements in semiconductor manufacturing.

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