Ching-Yi Chen

Title: Innovations and Contributions of Ching-Yi Chen in Semiconductor Technology

Introduction

Ching-Yi Chen, based in Hsinchu, Taiwan, is a notable inventor with an impressive portfolio of 20 patents. His work primarily focuses on advancements in semiconductor technology, particularly in the area of adhesion improvement and contact plug formation methods. His innovations contribute significantly to enhancing device performance and reliability in the semiconductor industry.

Latest Patents

Some of Ching-Yi Chen's latest patents include two noteworthy inventions. The first is a treatment for adhesion improvement that utilizes nitrogen plasma treatment on an adhesion layer of a contact plug. This innovative approach allows nitrogen to be incorporated into the adhesion layer, facilitating the formation of a metal nitride interlayer between the contact plug and the adhesion layer, as well as between the contact plug and the insulating layer.

The second patent details a barrier-free approach for forming contact plugs. This method involves etching a dielectric layer to create an opening, followed by the deposition of a metal layer that reacts with an underlying semiconductor region to form source/drain regions. Additionally, a plasma treatment process enhances the substrate using a mix of hydrogen gas and a nitrogen-containing gas, ultimately leading to the deposition of a metallic material on the newly formed silicon-and-nitrogen-containing layer.

Career Highlights

Ching-Yi Chen has garnered substantial industry experience, having worked with prominent companies such as Taiwan Semiconductor Manufacturing Company Limited and TSMC Solid State Lighting Limited. His expertise in semiconductor technology and his innovative contributions have made him a key figure within these organizations.

Collaborations

Throughout his career, Ching-Yi Chen has collaborated with talented colleagues, including Hao-Yu Yang and Yu-Sheng Tang. These collaborations have enabled the exchange of ideas and further fueled advancements in semiconductor research and development.

Conclusion

Ching-Yi Chen's extensive work in the semiconductor field, particularly through his 20 patents, showcases his dedication to innovation and improvement in technology. His latest inventions on adhesion enhancement and contact plug formation serve as significant contributions to the industry, reflecting both his technical prowess and commitment to advancing semiconductor performance.