Chih Ming Chen

Title: The Innovations of Chih Ming Chen

Introduction

Chih Ming Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of seven patents. His work primarily focuses on advancements in flash memory cell fabrication.

Latest Patents

One of his latest patents is a method for fabricating an embedded flash memory cell. This method allows for the creation of flash cells beyond the 0.35 µm generation. The process begins with the formation of a relatively thick field oxide layer on a P-type substrate, which separates the flash cell areas from the logic cell area. The flash cell areas are then divided into tunnel oxide windows and capacitor coupling areas. A conventional photolithography and etching method is employed to create a patterned photoresist on the substrate, exposing the flash cell areas. N-type conductive dopants are implanted into the substrate, with a concentration increased to 5E17 to 1E19 atoms/cm³ for the 0.35 µm generation. Following this, the patterned photoresist layer is removed, and thicker tunnel oxide and thinner gate oxide layers are formed in a single processing step. A doped polysilicon layer is then deposited over the tunnel oxide layer to serve as the floating gate of the flash cell.

Another notable patent is for a split gate flash memory cell formed in a semiconductor substrate. This memory cell includes a deep n-well and a p-well, along with a select gate structure comprising a stack of gate oxide, polysilicon layer, and cap oxide. The memory cell is programmed by source side channel hot electron and is erased using channel erasing to enhance cycling endurance.

Career Highlights

Chih Ming Chen has worked with several notable companies in the semiconductor industry, including Worldwide Semiconductor Manufacturing Corporation and Taiwan Semiconductor Manufacturing Company Ltd. His expertise in semiconductor technology has positioned him as a key figure in the development of innovative memory solutions.

Collaborations

Throughout his career, Chen has collaborated with esteemed colleagues such as Min-hwa Chi and Dean E Lin. These collaborations have further enriched his contributions to the field of semiconductor technology.

Conclusion

Chih Ming Chen's innovative work in the semiconductor industry, particularly in flash memory cell fabrication, has led to significant advancements in technology. His patents reflect a deep understanding of the complexities involved in semiconductor design and