The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1996
Filed:
May. 10, 1995
Taiwan Semiconductor Manufacturing Company Ltd., Hsin-chu, TW;
Abstract
The invention provides a vacuum pencil having an abutment pin which limits the distance the tip of the vacuum pencil can extend past the edge of a wafer thus reducing scratches on the device sides of adjacent wafers. The vacuum pencil has a relatively flat tip connected to a body. The tip has a flat top side for engaging a wafer. The top side of the tip has channels for delivering a vacuum to seal against the wafer against the tip. The top side of the tip also has an pin mounted between the channels and the body. A passage for delivering a vacuum runs through the body and the channel is connected to the channel in the tip. The pin can be a pentagon shaped pin which is about 1 mm high.