Chien-Pin Sherman Hsu

Title: Chien-Pin Sherman Hsu: Innovator in Microelectronic Cleaning Compositions

Introduction

Chien-Pin Sherman Hsu is a notable inventor based in Basking Ridge, NJ (US). He has made significant contributions to the field of microelectronics, particularly in the development of cleaning compositions and etchants. With a total of 11 patents to his name, Hsu's work has had a profound impact on the industry.

Latest Patents

One of Hsu's latest patents is focused on non-aqueous tungsten compatible metal nitride selective etchants and cleaners. This invention presents a novel acidic fluoride activated cleaning chemistry. The composition includes unique organic-solvent based microelectronic selective etchant and cleaner formulations that exhibit high metal nitride etch rates and broad compatibility, particularly with tungsten (W) and low-k materials. Importantly, it avoids the use of W-incompatible oxidizers, such as hydrogen peroxide, and particle-generating corrosion inhibitors. Another significant patent involves microelectronic substrate cleaning compositions that utilize copper/azole polymer inhibition. This semi-aqueous, alkaline cleaning composition has a pH of 8 or higher.

Career Highlights

Throughout his career, Hsu has worked with prominent companies in the industry, including Mallinckrodt Baker, Inc. and Avantor Performance Materials, Inc. His expertise in microelectronic cleaning technologies has positioned him as a leader in this specialized field.

Collaborations

Hsu has collaborated with notable professionals, including Paul A Bouis and Steven C Magee. These partnerships have contributed to the advancement of his innovative work in microelectronics.

Conclusion

Chien-Pin Sherman Hsu's contributions to the field of microelectronics through his patents and collaborations highlight his role as a significant inventor. His innovative cleaning compositions and etchants continue to influence the industry positively.