The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Jan. 14, 2010
Chien-pin S. Hsu, Basking Ridge, NJ (US);
Glenn Westwood, Edison, NJ (US);
William R. Gemmill, Bethlehem, PA (US);
Chien-Pin S. Hsu, Basking Ridge, NJ (US);
Glenn Westwood, Edison, NJ (US);
William R. Gemmill, Bethlehem, PA (US);
Avantor Performance Materials, Inc., Phillipsburg, NJ (US);
Abstract
A cleaning composition for cleaning microelectronic or nanoelectronic devices, the cleaning composition having HF as the sole acid and sole fluoride compound in the composition, at least one primary solvent selected from the group consisting of sulfones and selenones, at least one polyhydroxyl alkyl or aryl alcohol co-solvent having metal ion complexing or binding sites, and water, and optionally at least one phosphonic acid corrosion inhibitor compound and the is free of amines, bases and other salts.