The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Jun. 13, 2007
Applicant:
Chien-pin S. Hsu, Basking Ridge, NJ (US);
Inventor:
Chien-Pin S. Hsu, Basking Ridge, NJ (US);
Assignee:
Mallinckrodt Baker, Inc., Phillipsburg, NJ (US);
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
Ammonia-free, HF-free cleaning compositions for cleaning photoresist and plasma ash residues from microelectronic substrates, and particularly to such cleaning compositions useful with and having improved compatibility with microelectronic substrates characterized by sensitive porous and low-κ to high-κ dielectrics and copper metallization. The cleaning composition contain one or more non-ammonium producing, non-HF producing fluoride salt (non ammonium, quaternary ammonium fluoride salt) in a suitable solvent matrix.