The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
May. 27, 2003
Applicant:
Chien-pin Sherman Hsu, Basking Ridge, NJ (US);
Inventor:
Chien-Pin Sherman Hsu, Basking Ridge, NJ (US);
Assignee:
Avantor Performance Materials, Inc., Center Valley, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/39 (2006.01); C23G 1/06 (2006.01); G03F 7/42 (2006.01); H05K 3/26 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C23G 1/061 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01); H05K 3/26 (2013.01); H05K 2203/0783 (2013.01); H05K 2203/121 (2013.01); H05K 2203/122 (2013.01);
Abstract
Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k di-electrics and copper or aluminum metallizations contain a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and a strong alkaline base.